3905 超音波浮揚を用いた二次元非接触搬送の研究(G10-1 電磁気,音波関連技術,G10 機械力学・計測制御)

概要

論文の詳細を見る
There is an Ultrasonic Levitation Technique in which a lightweight particle can be held in the standing wave node of ultrasonic wave. In recent years, it was discovered that a heavier object is levitated very near the vibration surface. Furthermore, it also reappeared on the beam; the application to non-contact transfer device, such as a liquid crystal glass substrate and silicon wafer, came to be expected. Until now, we have made the success of position control experiment on the beam, by forming the traveling wave with phase control of vibration signal, and suchlike. Next, the two-dimensional transfer experiment was tried that replace the beam with the plate and connect the transducer to four corners. As a result, levitation as with the beam was confirmed, but transfer with traveling wave control as with the beam was not done.
一般社団法人日本機械学会の論文
2005-09-18