409 熱物性顕微鏡による薄膜の熱物性測定(関東支部茨城講演会)

概要

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We have developed a thermal microscope for thermophysical property distribution measurements based on the thermoreflectance method. By means of this method, we can measure thermophysical properties of thin film and coating materials in millimeter to sub-micrometer scale. It makes possible to measure thermal effusivity with high spatial resolution. This technology can be applied for evaluations of new materials, such as intermetallic compounds functionally graded materials, composite materials, superconducting materials, fine ceramics, and semiconductors.
2005-09-08