Sub-aperture Approaches for Precision Polishing and Metrology(Surface and edge finishing)
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概要
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This paper will briefly review Magnetorheological Finishing (MRF^[○!R]), a deterministic sub-aperture polishing method that has been developed to overcome many of the fundamental limitations of traditional finishing, and will discuss the Subaperture Stitching Interferometer (SSI^[○!R]) as a production-ready, metrology system, enabling cost effective manufacturing of precision optical surfaces. A summary of QED Technologies' latest developments in the field of high-precision subaperture polishing and metrology will be presented.
- 2005-10-18
著者
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KUME Tamotsu
QED Technologies Japan, Inc.
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TRICARD Marc
QED Technologies, Inc.
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DUMAS Paul
QED Technologies, Inc.
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MURPHY Paul
QED Technologies, Inc.
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Tricard Marc
Qed Technologies
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Kume Tamotsu
Qed Technologies Japan Inc.
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Dumas Paul
Qed Technologies Inc.
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Murphy Paul
Qed Technologies Inc.
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