Study on the polishing mechanism of low temperature co-fired ceramic for microsystem application(Surface and edge finishing)

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概要

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• Multilayer ceramics based on the low-temperature co-fired ceramics (LTCC) are gaining increasing interests in the manufacturing of highly-integrated systems for microelectronic and micro-system applications. The polishing experiments of sintered LTCC using a custom-built precision polishing machine are reported in this paper. First, a micro-fluidic distributor was fabricated using LTCC. Then, the polishing of this meso-MEMS system was studied using several polishing parameters. By optimizing the polishing parameters, the surface roughness of these sintered LTCC can be reduced to 4nm.

• 2005-10-18

著者

• Ang Simon

  Department Of Electrical Engineering University Of Arkansas

• Zhu Jijun

  Key Laboratory of Bioelectronics, Southeast University

• Yuan Julong

  Precision Engineering Laboratory, Zhejiang University of Technology

• Yuan Julong

  Precision Engineering Laboratory Zhejiang University Of Technology

関連論文

• Study on the polishing mechanism of low temperature co-fired ceramic for microsystem application(Surface and edge finishing)

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