A Picometer Positioning System using Active Aerostatic Guideway(Precision positioning and control technology)

概要

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A novel tri-mode ultraprecision positioning system is proposed. The basic coarse mode for nanometer positioning with long stroke and the fine mode for sub-nanometer positioning are executed by using the Twist-roller friction drive (TFD). The ultra-fine mode utilizes the aerostatic guideway with the Active Inherent Restrictor (AIR) for realizing picometer positioning. The performance of the ultra-fine mode is analyzed and the experimental results of step positioning in the range of sub-nanometer and are shown.
一般社団法人日本機械学会の論文
2005-10-18