Machining and Molding of Microcantilever Sensors(M^4 processes and micro-manufacturing for science)

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概要

• 論文の詳細を見る

• A miniaturized six axis vertical machining center with linear positioning resolution of 4nm by 10nm by 10nm, accuracy on the order of 0.3μm, in the height, feed, and cross feed directions is presented. The ranges of axes travel are 4mm by 25mm by 25mm in the height, feed, and cross feed and 20 degrees in the rotational space. An injection mold was made of steel with this machine and plastic microcantilevers were fabricated from polystyrene were 464 to 755μm long, 130μm wide, and only 6-9μm thick.

• 一般社団法人日本機械学会の論文
• 2005-10-18

著者

• Woodruff George

  School Of Mechanical Engineering

• COX Daniel

  Georgia Institute of Technology

• MCFARLAND Andrew

  Georgia Institute of Technology

• LIANG Steven

  Georgia Institute of Technology

• COLTON Jonathan

  Georgia Institute of Technology

関連論文

• Machining and Molding of Microcantilever Sensors(M^4 processes and micro-manufacturing for science)

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