Mirror Grinding of Quartz-Crystal with EPD Pellet(Grinding technology)
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概要
- 論文の詳細を見る
Fine silica abrasives wheel by electrophoretic deposition phenomenon, EPD pellet, was fabricated and applied to mirror grinding of 3 inches quartz-crystal wafers for the purpose of evaluating the grinding performance. Then. EPD pellets made a mirror surface and the final roughness was 6.5nmRy. The time required for making the mirror surface was less than 10min. No residual strain was found on the ground surface.
- 一般社団法人日本機械学会の論文
- 2005-10-18
著者
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HORIUCHI OSAMU
Department of Musculoskeletal Medicine, Nagoya City University Medical School
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Horiuchi Osamu
Department Of Production Systems Engineering Toyohashi University Of Technology
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Horiuchi Osamu
Department Of Applied Chemistry Faculty Of Engineering Shibaura Institute Of Technology
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SHIBUTANI Hideo
Graduate School of Science and Engineering, Saitama University
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SUZUKI Hirofumi
Faculty of Engineering, Kobe University
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SHIBUTANI Hideo
Department of Production Sciences, Graduate School of Science and Engineering, Saitama University
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IKENO Jun-ichi
Department of Production Sciences, Graduate School of Science and Engineering, Saitama University
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SUZUKI Hirofumi
Department of Mechanical Engineering, Kobe University
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Suzuki Hirofumi
Faculty Of Engineering Kobe University
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Suzuki Hirofumi
Department Of Biology Fukuoka University Of Education
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Ikeno Jun-ichi
Graduate School Of Science And Engineering Saitama University
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Shibutani Hideo
Graduate School Of Science And Engineering Saitama University
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