FeCuPt Grains Fabricated On SiO_2 Substrates Having Self-Organized Nano-Pores(Selected papers from MORIS 2006 Workshop on Thermal & Optical Magnetic Materials and Devices)

概要

論文の詳細を見る
Cu substitution raises the degree of (001) crystal orientation perpendicular to the film surface for FeCuPt prepared by Rapid Thermal Annealing (RTA). To increase areal packing density of FeCuPt grains, a SiO_2 Substrate having self-organized nano-pores was used as a nano-template. The highly ordered structure of the mesophase thin film is formed by the ordering of self-assembled triblock copolymer micelles, and after annealing at about 600℃, 8nm nano-pore arrays formed where there had been micells. Ar-etched SiO_2 substrate with self organized nano-pores is effective in increasing the areal packing density and decreasing the size of FeCuPt grains prepared by RTA. An average grain diameter, standard deviation of diameter and areal packing density of FeCuPt grains were 5.9nm, 1.3nm and 0.57 (about 3 times the non Cu substituted case), respectively. We observed (001) peak and almost no peak at (111) by x-ray diffraction, where the degree of (001) crystal orientation I(001) / I(111)>3 means a high rate of ordering orientation, which gives us reliable evidence of ordered FeCuPt grains.
社団法人日本磁気学会の論文
2006-11-01