The Development of the scanning low energy electron microscopy (SLEEM) for the conventional SEM : 1. Instrumentation and Theoretical background(研究課題:ナノスケール組織を有する軽量材料の開発とその構造解析に関する研究)

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概要

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• The adaptation of a scanning electron microscope to the SLEEM mode has proved itself very fruitful in solving important tasks in the development and examination of aluminum-based alloys and composites. When taking micrographs around 1 keV of electron energy, much better resolution and an image signal around one order of magnitude higher are obtained in the SLEEM mode in comparison to the standard SEM mode. Already at this energy the microscope performance is enhanced to a level well comparable with that of a cold-field-emission gun equipped top-class device. In the range of hundreds and tens of eV the SLEEM mode clearly beats all conventional type SEMs existing so far as regards image parameters.

著者

• Frank Ludek

  Rndr. Director Of Institute Of Scientific Instruments Ascr

関連論文

• The Development of the scanning low energy electron microscopy (SLEEM) for the conventional SEM : 1. Instrumentation and Theoretical background(研究課題:ナノスケール組織を有する軽量材料の開発とその構造解析に関する研究)

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