CS-12-7 Multi-Scale, Hierarchical Integration of Polymer Nanostructures in MEMS(CS-12. 次世代ナノ技術と情報通信, エレクトロニクス2)

スポンサーリンク

概要

• 論文の詳細を見る

• This paper describes our new fabrication technique that achieves hierarchical integration of polymeric nanopatterns in microelectromechanical systems (MEMS). This fabrication technique employs a soft polymer nanofabrication technique, which provides technological foundations for emerging nanosciences and nanotechnology. A new class of photonic MEMS device is demonstrated using this technique.

• 社団法人電子情報通信学会の論文
• 2005-03-07

著者

• Kurabayashi Katsuo

  Department of Mechanical Engineering University of Michigan

• Kurabayashi Katsuo

  Department Of Mechanical Engineering:department Of Electrical Engineering & Computer Science Uni

• Tung Yi

  Department Of Mechanical Engineering

関連論文

• TED-AJ03-420 IMPACT OF SKIN EFFECT ON THERMAL BEHAVIOR OF RF MEMS SWITCHES
• CS-12-7 Multi-Scale, Hierarchical Integration of Polymer Nanostructures in MEMS(CS-12. 次世代ナノ技術と情報通信, エレクトロニクス2)

スポンサーリンク