新規な非酸化物系ゾルゲル法によるメソポーラスアモルファスSi-C-N膜の合成と評価(<ゲストエディターによる特集>有機-無機変換プロセス)

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概要

• 論文の詳細を見る

• A novel sol-gel-derived preceramic polymer, namely poly (organosilyl) carbodiimide, was synthesized for fabrication of thermally stable amorphous Si-C-N membranes. The gelation process as well as the viscosity of the poly (organosilyl) carbodiimide was adjusted for spin coating by reacting a mixture of alkyl and dialkyl chlorosilane monomers with bis (trimethylsilyl) carbodiimide. The polymeric precursor film was successfully fabricated on a porous substrate by solvent-free spin coating, subsequently converted into a mesoporous amorphous Si-C-N thin film by pyrolysis at 1000℃ in Ar. SEM observation as well as N_2 sorption isotherm analysis exhibited the formation of meso-pore channels within the amorphous thin layer. These results indicate that the novel poly (organosilyl) carbodiimide developed in this study is suitable for fabricating meso-porous amorphous membranes in the ternary Si-C-N system and with high thermal and chemical stability.

• 社団法人日本セラミックス協会の論文
• 2006-06-01

著者

• IKUHARA Yumi

  Japan Fine Ceramics Center

• IWAMOTO Yuji

  Japan Fine Ceramics Center

• Iwamoto Yuji

  Japan Fine Ceramics Center (jfcc)

• Iwamoto Yuji

  Japan Fine Ceramic Center

• Hauser Ralf

  Institut Fur Materialwissenschaft Technische Universitat Darmstadt

• Riedel Ralf

  Darmstadt University Of Technology

• Ikuhara Yumi

  Japan Fine Ceramics Center (jfcc)

• VOLGER Karl

  TBK-Patent, Munchen, Germany

• HAUSER Ralf

  Darmstadt University of Technology, Institute of Materials Science

• KROKE Edwin

  TU Bergakademie Freiberg, Institute of Inorganic Chemistry

• Kroke Edwin

  Tu Bergakademie Freiberg Institute Of Inorganic Chemistry

• Volger Karl

  Tbk-patent Munchen Germany

関連論文

• Development of Fine Porous Alumina Capillaries by a Dry-Wet Spinning Method(Synthesis and Processing,Guest Editors Dedicated to Prof. Gunter Petzow: Modern Trends in Advanced Ceramics)
• 03-P-13 Microstructure Design of LiMn_2O_4 Thin Films through Chemical Solution Deposition
• 高温用分離膜としての応用を思考したポリマープレカーサーからのSiBCN系セラミックスの合成(有機-無機変換プロセス)
• Atomic Structure and Diffusion in Amorphous Si-B-C-N by Molecular Dynamics Simulation
• 新規な非酸化物系ゾルゲル法によるメソポーラスアモルファスSi-C-N膜の合成と評価(有機-無機変換プロセス)
• Preface(Organic-to-Inorganic Conversion Process for Polymer-Derived Ceramics)
• ポリマーから誘導されたケイ素系セラミックス : 合成・性質・応用に関する総説(有機-無機変換プロセス)
• Preface(Guest Editors Dedicated to Prof. Gunter Petzow: Modern Trends in Advanced Ceramics)

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