MD Simulation of Ultra-Micro Cutting of Monocrystalline Silicon with Effects of Air(<Special Issue>Advanced Manufacturing Technology [I])

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概要

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• Effect of atmosphere in ultra-micro cutting has been analyzed using MD (molecular dynamics) simulation carried out in such a way that potentials of surface atoms of diamond tool and silicon workpiece are modified when either of them is exposed to atmosphere. The results of the simulation show that principal cutting force decreases if the rake face of a tool and/or the rear face of chips are exposed to atmosphere during cutting. This result is consistent with the result obtained in microcutting experiments carried out by the authors and also indicates an important role of atmosphere in ultra-sonic vibration cutting.

• 一般社団法人日本機械学会の論文
• 2006-03-15

著者

• Takezawa Nobuhiro

  Nagoya Institute Of Technology

• Inamura Toyoshiro

  Nagoya Institute Of Technology

• LIU Yanjie

  Nagoya Institute of Technology

関連論文

• MD Simulation of Ultra-Micro Cutting of Monocrystalline Silicon with Effects of Air(Advanced Manufacturing Technology [I])
• MD Simulation of Ultra-micro Cutting of Monocrystalline Silicon with Effects of air(Analytical advancement of machining process)

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