クリーンルーム気流の均一性に関する研究

概要

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In unidirectional flow cleanrooms, it is important to form a uniform airflow distribution to exhaust quickly contaminants generated indoors. The uniformity of airflow distribution in a cleanroom has been studied as function of the height of plenum chamber and the velocity of flow introduced into the chamber. The influences of the height of the plenum chamber and the velocity of the flow introduced into the chamber on the airflow uniformity are investigated by experiment. In addition, a numerical simulation method to predict the flow uniformity is proposed by taking into account the characteristics of filter's pressure loss. The calculation domain in this study includes not only the cleanroom but the plenum chamber and the exhaust chamber. The validity of the numerical method is also verified by comparing the simulation results with the experimental results. Finally, the method is used to obtain an appropriate height of the plenum chamber and an appropriate velocity of the flow introduced into the chamber.
社団法人日本建築学会の論文
1994-04-30