生産機器周辺に発生する汚染域の解消方法の開発

概要

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It has become necessary to save the cost of renewal and operation for a cleanroom. Even though a uniderectional dleanroom has difficulty to keep all space clean, th ratio of productive area should be large as much as possible. We have big issues that the uniderectional C.R.'s (Cleanrooms) equipped with FFU (Fan Filter Unit) locally generated dirty & low grade clean area in a highgrade cleanroom. To solve this problem, we have investigated the effectiveness of installation of the FFU newly designed by us close to model manugactuireng tool and evaluated the control of perational conditon of this FFU to eliminate the high contamination area around the model manufactuireing tools. In this paper, we investigate how do the changed PSL standard particles migratre of transfer in each state of ekectrification in a super cleanroom and verify the dilution effect of secondary ionized air supply from IFFU (Fan Filter Unit equipped With Ionizer)
2005-03-18