552 Dynamic Modeling and Control of a Piezo-Actuated Positioning Stage

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This paper addresses the dynamic modeling and control of a piezo-actuated mechanism, which is used in high precision positioning applications. An electromechanical model, based on physical principles, was built and the piezoelectric actuator dynamics was taken into account in this model. The piezoelectric actuator was modeled from the Hamilton's principle and the whole system was modeled by the equivalent circuit, which combines the electrical and mechanical impedance of the piezoelectric actuator and the impedance of the mechanical stage through a piezoelectric transformer. Experiments were performed to verify the electromechanical model by its frequency response and step response in advance. Then, the shunted circuit was considered to modify the piezo-actuated stage dynamic characteristics and a PID feedback controller was designed which is based on the modified model. In the last, experiments were performed for tracking control. The results show that the positioning control performance is greatly improved by the shunted circuit and the feedback loop.
一般社団法人日本機械学会の論文
2004-09-27