高効率酸化チタン透明薄膜光触媒の開発 : 可視光応答型TiO_2薄膜への挑戦
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概要
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TiO_2 photocatalysts are used as antibacteria, water or air purification arid so on. Since it is able to form an oxide film on the semiconductor surface at high speed at low temperature comparatively, the application of the TiO_2 photocatalysts to semiconductor microprocessing technology is expected. The TiO_2 thin film photocatalysts prepared at the relatively higher deposition temperatures and the oxygen deficient type TiOx(x = 1.99〜1.98) absorbs in visible light regions efficiently. We formed the TiO_2 thin films on a grass substrate by RF magnetron sputtering without heating and verified the photocatalyst effect by the coliform bacillus colony counting method. The TiO_2 thin films showed about 2.2 times higher the photocatalyst effects compared to the past experimental results.
- 秋田工業高等専門学校の論文
- 2004-02-28