Effective-Refractive-Index Method for a Flying-Height Sensor Using Frustrated Total Reflection and Its Application to Flying-Height Measurement on an Actual Magnetic Disk

概要

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It is necessary to measure the flying height of a slider on an actual magnetic disk when designing magnetic disk drives.However in typical methods for measuring spacing, the magnetic disk is usually replaced with a glass disk.To measure this real spacing, we developed a flying-height sensor based on frustrated total relfection.However, to measure the real flying height optically, the phase shift on reflection at a magnetic disk is an important problem.We developed a theoretical treatment of this problem and introduced the modified effective-refractive-index method.We measured the effective-refractive-index of an actual magnetic disk.Flying height on the magnetic disk was also measured by using the obtained effective-refractive-index.This result was compared with the flying heights measured by using the traditional interference method.Both measurements agreed well with an error of less than 2 nm.
一般社団法人日本機械学会の論文
1999-06-15