Experimental Test of a Three-Dimensional Model for Electrophysical Properties of Metal Films

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概要

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• A three-dimensional model of strain sensitivity proposed by [Tellier, Tosser: Thin Solid Films 59 (1979) 163; Tosser, Tellier and Pichard: J. Mater. Sci. 16 (1981) 944] has been tested for thin Cr, Cu and Co films. The films were obtained by electron-beam evaporation in a vacuum of 10^<-4>-10^<-5> Pa. Film structure stabilization was carried out by heating and cooling at the rate of 3 K/min in the range of 300 to 520 K. The identity of properties of the films obtained on the glass (during the termal coefficient of resistance (TCR) measuring) and the textolite glass (during the strain-sensitivity coefficient (SSC) measuring) substrates was examined according to Vand method on lattice distortion energy spectra for films of different thickness, where the spectra were calculated from the resistance-temperature data. It has been shown that the experimental results of the strain sensitivity agree with the calculated ones only under the assumption of size dependence of the electron mean-free part.

• 社団法人応用物理学会の論文
• 2000-12-15

著者

• Pogrebnjak Alexander

  Sumy Institute For Modification:department Of Electrical Engineering Laboratory Of Beam Technology N

• CHORNOUS Anatoly

  Sumy State University

• OPANASYUK Nadia

  Sumy State University

• PROTSENKO Ivan

  Sumy State University

関連論文

• Effect of Fe and Zr Ion Implantation and High-Current Electron Beam Treatment on Chemical and Mechanical Properties of Ti-V-Al Alloy
• Experimental Test of a Three-Dimensional Model for Electrophysical Properties of Metal Films

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