Electron Emission from Graded Al_xGa_<1-x>N/GaN Negative-Electron-Affinity Cold Cathodes
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概要
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A new cold cathode based on Schottky junction using the III-V nitride semiconductor which exhibits negative-electronaffinity(NEA)was proposed. The cold cathode was composed of non-doped graded Al_xGa_<1-x>N/n-type GaN layers grown by metal organic chemical vapor deposition(MOCVD)on sapphire(0001)substrates and thin surface electrode acting as Schottky contact. A part of electrons led to the NEA Al_xGa_<1-x>N surface smoothly by band-engineering, in which Al composition x increased continually toward the surface from the n-GaN side, was emitted through the thin surface electrode. The emission current of a few μA/cm^2 was observed under forward bias of about 5 V for the III-V nitride Schottky junction.
- 社団法人応用物理学会の論文
- 2000-07-01
著者
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DEGUCHI Masahiro
Advanced Technology Research Laboratories, Matsushita Electric Industrial Co., Ltd
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UENOYAMA Takeshi
Advanced Technology Research Laboratories, Matsushita Electric Industrial Co., Ltd
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