Microscale Wear Properties of Ultrathin Diamond-Like Carbon Films

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概要

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• Microscale wear properties of ultrathin diamond-like carbon (DLC) films grown by rf plasma-enhanced chemical vapor deposition were investigated using an atomic force microscope. It was revealed that a low wear-resistant layer, which contained a larger sp^2 component, existed on the surface of the films. The thickness of the layer depended on the self-bias voltage during deposition. The intermixing of carbon and silicon atoms at the interface between the DLC and the substrate was found to affect the surface wear resistance of ultrathin DLC films.

• 社団法人応用物理学会の論文
• 2000-06-15

著者

• Shimura Ken-ichi

  Functional Materials Research Laboratories Nec Corporation

• Baba Kazuhiro

  Functional Materials Research Laboratories Nec Corporation

関連論文

• Microscale Wear Properties of Ultrathin Diamond-Like Carbon Films

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