Development of a Fluid-Driven Microactuator
スポンサーリンク
概要
- 論文の詳細を見る
In this paper we describe a new design of a fluid-driven microactuator which comprises a planar piston, a four-way control valve, and a mechanical feedback system that controls the output in accordance with an input displacement. Merits of this design are expected in terms of output density, scalability, and feedback ability realized with no electronic devices. Fabrication processes of the microactuator include bulk micromachining of two sheets of silicon substrate and their assembly by electrostatic bonding to glass plates. The output characteristics were measured while compressed air was supplied. Generated output force showed an almost linear relationship to supplied pressure and to valve displacement. However, the magnitude was asymmetric in terms of driven directions, which resulted from geometrical configuration essentially introduced by an anisotropic etching of the silicon substrate. The position of the output shaft was sufficiently controlled with a designed magnification factor multiplied to the input displacement in both static and dynamic senses.
- 一般社団法人日本機械学会の論文
- 1997-03-15
著者
-
Ikei Yasushi
Faculty Of Engineering Tokyo Metropolitan Institute Of Technology
-
Ikei Yasushi
Faculty Of Engineering Osaka University
-
YAMAZAKI Kazuo
Faculty of Engineering, Tokyo Metropolitan Institute of Technology
-
KOGA Akihiro
Toshiba Corp., R&D Center
-
MORIKAWA Hisashi
Sumitomo Electric Industries
-
FUKUDA Shuichi
Faculty of Engineering, Tokyo Metropolitan Institute of Technology
-
Yamazaki Kazuo
Faculty Of Engineering Tokyo Metropolitan Institute Of Technology
-
Koga Akihiro
Toshiba Corp. R&d Center
-
Fukuda Shuichi
Faculty Of Engineering Tokyo Metropolitan Institute Of Technology
関連論文
- Feature Representation and Manipulation Aid for a 3D Virtual Object by a Finger-Mounted Tactile Display
- Structure Design Fused with Electronic Devices of Holonic Manipulator
- Development of a Fluid-Driven Microactuator
- Switching Torque Converter: Concept and Preliminary Implementation