Development of a Flexure-Hinged Translation Mechanism Driven by Two Piezoelectric Stacks
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概要
- 論文の詳細を見る
This paper describes a monolithically constructed, flexure-hinged translation mechanism suitable for mechanical scanning stages of very high precision. Two piezoelectric stacks are employed to drive the mechanism ; one piezoelectric stack pushes whilst the other pulls the moving platform. This push-pull drive system is effective for raising the natural frequency of the stage. The mechanism described in this paper functions as both a guide for rectilinear motion and a mechanical amplifier to amplify a limited output displacement of the piezoelectric stack. Static and dynamic characteristics of the mechanism are considered in detail, and design equations are presented. The validity of the design equations is confirmed by experiment. A brief description of the accuracy of motion of the moving platform is included. It is demonstrated that a scan range of 60 μm is achievable with a natural frequency as high as 1175 Hz in the scanning direction.
- 一般社団法人日本機械学会の論文
- 1995-12-15
著者
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MIZUNO MAKOTO
Faculty of Pharmaceutical Sciences, Nagoya City University
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Mizuno Makoto
Faculty Of Science And Engineering Chuo University
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Mizuno Makoto
Faculty Of Pharmaceutical Sciences Nagoya City University : New Drug Research Laboratories Chugai Ph
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Furukawa Eiichi
Faculty of Science and Engineering, Chuo University
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Doi Toshio
Faculty of Science and Engineering, Chuo University
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Doi Toshio
Faculty Of Science And Engineering Chuo University
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Furukawa Eiichi
Faculty Of Science And Engineering Chuo University
関連論文
- THE STABILIZING ACTION OF HYDROXYPYRUVALDEHYDE PHENYLOSAZONE AND ITS DERIVATIVES ON BOVINE ERYTHROCYTE MEMBRANE
- Development of a Flexure-Hinged Translation Mechanism Driven by Two Piezoelectric Stacks