特別講演 Solid State Thick Film X-ray Image Sensor

概要

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X-ray response of polycrystalline-CdZnTe were measured by signal to noise(S/N) analysis. The CdZnTe material has optimal property in solid state X-ray detector and many research presented on single crystal CdZnTe with small sized silicon readout device, but it would be difficult to apply CdTe or CdZnTe single crystal to large area-flat pannel detectors such as radiography and mammography. As alternative of single crystal, we have grown polycrystalline CdZnTe thick films of high resistivity (>5 X10^9 Ohm cm) by thermal evaporation method on carbon substrate. A high signal-to-noise has a direct impact on the performance of CdZnTe X-ray detectors. Important image parameter such as dynamic range and detective quantum efficiency, rely on the signal and noise characteristics of the system. In this paper, we analyzed property of x-ray detector and obtained image of x-ray detector using data acquisition system. X-ray detector used the Cdl-xZnxTe(x=0.04) which used carbon substrate and gold as electrode. The detector design is planar, 32mm×10mm size and 1.75mm×1mm pixel electrode size and 150μm detector thickness.
社団法人電子情報通信学会の論文
2006-01-21