Adsorption of Fluorine on Bare, Hydrogen- and Hydrocarbon-Covered Diamond C(111)Surfaces

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The adsorption of fluorine delivered as xenon difluoride has been examined on a bare diamond C(111)(2×1)surface as well as modified surface of hydrogen-terminated H:C(111)(1×1)and hydrocarbon-precovered CH_x/C(111)by means of Auger electron spectroscopy(AES), X-ray photoelectron spectroscopy(XPS)and low-energy electron diffraction(LEED).The F intake by bare C(111)(2×1)at nearly 10^5 Langmuir of XeF_2 exposure reached close to two monolayers on C(111).The adsorbed F was removed by annealing to 1400K in vacuum, and was replaced by atomic hydrogen generated by a hot filament.The saturation coverage of F on H:C(111)(1×1)was one monolayer.The adsorbed F on H:C(111)(1×1)was removed by annealing to 1300K and H:C(111)(1×1)was restored.On C(111)precovered with CH_x groups, the initial sticking probability of F was definitely smaller than that of C(111)(2×1).The adsorbed F was less stable and desorbed completely at 1200K.The structures of adsorbed F on C(111)(2×1) and H:C(111)(1×1) are discussed.
社団法人応用物理学会の論文
2000-04-15