Molybdenum Film Technology For Power Metal Oxide Semiconductor Field Effect Transistor Gate Electrode Applications

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-07-15

著者

• Wang Zhan-li

  Hebei Semiconductor Research Institute

• Liang Chun-guang

  Hebei Semiconductor Research Institute

• Liu Ying-kun

  Department Of Physics Lanzhou University:hebei Semiconductor Research Institute

• HE Yu-Zhang

  Hebei Semiconductor Research Institute

• LANG Xiu-Lan

  Hebei Semiconductor Research Institute

• ZHOU Ming-Hui

  Hebei Semiconductor Research Institute

関連論文

• Molybdenum Film Technology For Power Metal Oxide Semiconductor Field Effect Transistor Gate Electrode Applications

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