光音響法による表面傾斜欠陥の検出(S05-2 薄膜界面はく離・欠陥評価,S05 薄膜の強度物性と信頼性)

概要

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In this study, the imaging of simulated surface defect using a photoacoustic (PA) microscope has been demonstrated. The surface tilt defect was the slit-type simulated defect, whose length was fixed to be about 4.0mm. The surface tilt defect with a width of 0.3 mm was introduced into the specimen by mechanical processing. The depth and angle values of the surface defects were 0.3 mm and 60, 70, 80 and 90 degrees in nominal value, respectively. By defining the "degree of asymmetry" as the ratio of the difference between two peaks of phase signal distribution to the height of their mean value from the background, the correlation coefficient between tilt angle and the degree of asymmetry showed the value of 0.997.
社団法人日本機械学会の論文
2004-09-04