Diagnostics of KrF- and Nd : YAG-Laser Produced Carbon Plumes by Time- and Spatially-Resolved Spectoroscopy

概要

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Graphite was ablated by three lasers and the resultant carbon plumes were investigated by time- and spatially-resolved spectroscopy. A KrF excimer laser(248 nm)and an Nd : YAG laser(1064 and 266 nm)were used. Near the target surface, C_2(Swan band)and ionic emissions from the plume produced by the 1064-nm laser at a fluence of 6 J/cm^2 were stronger than those produced by the 248-nm and 266-nm lasers. The C emission lines(247.9 and 193.1 nm)produced by the KrF excimer laser were stronger than those produced by the other lasers. The most probable velocity of C^+ was highly dependent upon the laser wavelength. The dependence of the most probable velocity on the fluence was small. The velocity of C^+ ablated by the 248-nm laser was twice as fast as that ablated by the 1064-nm laser, when the fluence of the 1064-nm laser was six times as large as that of the 248-nm laser.
社団法人応用物理学会の論文
2000-11-15