A New Nondestructive Evaluation Method for Surface Acoustic Wave Velocity
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-09-30
著者
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Uda Satoshi
Microelectronics Laboratories Mitsutbishi Materials Co. Ltd.
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Tsuboi Atsushi
Microelectronics Laboratories Mitsutbishi Materials Co. Ltd.
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JIAN Chunyun
Microelectronics Laboratories, Mitsubishi Materials Corp.
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Jian Chunyun
Microelectronics Laboratories Mitsutbishi Materials Co. Ltd.
関連論文
- Analysis of Surface Acoustic Wave Properties of the Rotated Y-cut Langasite Substrate
- A New Nondestructive Evaluation Method for Surface Acoustic Wave Velocity