Dose Uniformity of a Compact Beamline in Routine Operation with a Storage Ring "AURORA-2S"

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概要

• 論文の詳細を見る

• We have investigated the effects of the beam profile and beam drifts of synchrotron radiation(SR)on dose uniformity of a beamline for X-ray lithography(XRL). The dose uniformity varies only by ±1% even when the beam has changed in vertical width from 0.18mm to 0.65mm, while it varies within ±1.5% when the SR beam is moved ±1mm in the horizontal and ±0.1mm in the vertical. Moreover, the exposure intensity changes within ±2% under the various beam conditios. In routine operation, variation of the beam condition does not degrade the dose uniformity in our beamline.

• 社団法人応用物理学会の論文
• 2000-12-30

著者

• Li Xuan

  Research & Development Center Sumitomo Heavy Industries Ltd.

• Li X

  State Key Lab Of Superhard Materials Institute Of Atomic And Molecular Physics Jilin University

• HIROSE Sayumi

  Research & Development Center, Sumitomo Heavy Industries, Ltd.

• AMANO Daizo

  Research & Development Center, Sumitomo Heavy Industries, Ltd.

• MIYATAKE Tsutomu

  Research & Development Center, Sumitomo Heavy Industries, Ltd.

• HORI Toshitada

  Research & Development Center, Sumitomo Heavy Industries, Ltd.

• Amano Daizo

  Research & Development Center Sumitomo Heavy Industries Ltd.

• Hirose Sayumi

  Research & Development Center Sumitomo Heavy Industries Ltd.

• Hori Toshitada

  Research & Development Center Sumitomo Heavy Industries Ltd.

• Miyatake Tsutomu

  Research & Development Center Sumitomo Heavy Industries Ltd.

関連論文

• The Selective Area Deposition of Diamond Films
• Dose Uniformity of a Compact Beamline in Routine Operation with a Storage Ring "AURORA-2S"

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