Effects of Substrate Pretreatments and Catalyst Applications on Si-C-N Films and Nanotube Formations : Surfaces, Interfaces, and Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-12-15
著者
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Kuo C
National Chiao Tung Univ. Hsinchu Twn
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Chang H
National Chiao Tung Univ. Hsinchu Twn
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CHANG Hui
Department of Material Science and Engineering, National Chiao Tung University
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KUO Cheng
Department of Material Science and Engineering, National Chiao Tung University
関連論文
- Effects of Substrate Pretreatments and Catalyst Applications on Si-C-N Films and Nanotube Formations : Surfaces, Interfaces, and Films
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