Recycling of Metal-Organic Ru Precursor and the Influence of Organic Impurities on the Surface Morphology of Ruthenium Films(Cross-Disciplinary Areas)
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-01-15
著者
-
SUZUKI Hideshige
Graduate School of Science and Engineering, Yamagata University
-
Suzuki H
Graduate School Of Science And Engineering Yamagata University
-
Kurita Masaaki
Technical Department Tanaka Kikinzoku Kogyo Kk
-
OKAMOTO Koji
Technical Department, Tanaka Kikinzoku Kogyo KK
-
SUZUKI Hiroaki
Technical Department, Tanaka Kikinzoku Kogyo KK
-
SAITO Masayuki
Technical Department, Tanaka Kikinzoku Kogyo KK
-
TANIUCHI Junichi
Technical Department, Tanaka Kikinzoku Kogyo KK
-
KITADA Katsutsugu
Technical Department, Tanaka Kikinzoku Kogyo KK
-
Kurita Masaaki
Technical Department Tanaka Kikinzoku Kogyo K.k.
-
Taniuchi Junichi
Technical Department Tanaka Kikinzoku Kogyo Kk
-
Kitada Katsutsugu
Technical Department Tanaka Kikinzoku Kogyo Kk
-
Okamoto Koji
Technical Department Tanaka Kikinzoku Kogyo Kk
-
Saito Masayuki
Technical Department Tanaka Kikinzoku Kogyo Kk
関連論文
- Low-Temperature Processing of Pb(Zr_ Ti_)O_3 Thin Films by Sol-Gel Casting
- Effect of Blended Montomollironite on Crystallization of Poly(vinylidene fluoride)
- Test of ferroelectricity in non-stretched poly (vinylidene fluoride)/clay nanocomposites
- Effect of PbTiO_3 Seeding Layer on the Growth of Sol-Gel-Derived Pb (Zr_Ti_) O_3 Thin Film
- Recycling of Metal-Organic Ru Precursor and the Influence of Organic Impurities on the Surface Morphology of Ruthenium Films(Cross-Disciplinary Areas)
- Polarization Reversal in Ferroelectric Fluoro-Polymers
- Variation in 111 d-Space and Generation of Hillocks in Platinum Thin-Film Electrodes by Heat Treatment
- Room-Temperature Reactor Packed with Hydrophobic Catalysts for the Oxidation of Hydrogen Isotopes Released in a Nuclear Facility