Preparation of Thermochromic VO_2 Thin Films on Fused Silica and Soda-lime Glass by RF Magnetron Sputtering(Surfaces, Interfaces, and Films)

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The VO_2 thin films were deposited on fused silica and soda-lime glass by RF magnetron sputtering and characterized by X-ray diffraction (XRD) and BIORAD FTS 6000 spectrometer. The influence of stress on the phase transition temperature and shape was also discussed.
社団法人応用物理学会の論文
2002-01-15

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