Long-Pulse-Discharge XeF and KrF Lasers Pumped by a Generator with Inductive Energy Storage(Optics and Quantum Electronics)

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概要

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• The development of long-pulse-discharge XeF and KrF excimer lasers pumped by a generator with inductive energy storage and a semiconductor opening switch is reported. It is shown that the use of the inductive storage element enables sufficiently improved discharge stability and expands the laser pulse duration. The laser output pulses with a full-width at half maximum (FWHM) duration of 60 ns were obtained both in Ne-Xe-NF_3 and Ne-Kr-F_2 gas mixtures, corresponding to the laser specific output of 2.5 J/l and the intrinsic efficiency of over 1%.

• 社団法人応用物理学会の論文
• 2002-06-15

著者

• Tarasenko Victor

  High Current Electronics Institute

• Panchenko Alexei

  High Current Electronics Institute

• BAKSHT Evgenii

  High Current Electronics Institute

• MATSUNAGA Takashi

  Gigaphoton Inc.

• GOTO Tatsumi

  Komatsu Ltd.

• Pachenko Alexei

  High Current Electronics Institute

関連論文

• Long-Pulse-Discharge XeF and KrF Lasers Pumped by a Generator with Inductive Energy Storage(Optics and Quantum Electronics)
• UV and VUV Excilamps with High Peak Power

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