Backseattered Electron Signal from Alignment Mark : Experiment and Simulation

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概要

• 論文の詳細を見る

• A backscattered electron signal dependence on an alignment mark shape was experimentally studied to clarify the relation between signal and mark shape. Using a simple model for electron scattering, the relation is interpreted consistently and the signal is successfully simulated.

• 社団法人応用物理学会の論文
• 1981-06-05

著者

• Shiraki Hiroyuki

  Cooperative Labordtories Vlsi Technology Research Association

• AIZAKI Nao-aki

  Cooperative Labordtories, VLSI Technology Research Association

• Aizaki Nao-aki

  Cooperative Labordtories Vlsi Technology Research Association

関連論文

• Backseattered Electron Signal from Alignment Mark : Experiment and Simulation

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