An In-Process X-Ray Measuring System with a Heat-Resistant Filter Transmitting Soft X-Rays for Light Elements

概要

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We constructed a RHEED-Si (Li) SSD measuring system which has the capability to detect, in-process, characteristic X-rays emitted from light elements such as oxygen. The feature of the system is that the X-ray detecting system uses a heat-resistant filter made of an Al film and a BN film in front of the SSD. The filter transmission soft X-ray and blocks light and heat radiation which emanate from processes and influencce the SSD peformance. It was demonstrated that the measureing system could detect change in the O-K_α X-ray intensity from a SiO_2/si(100) sample when it was heated to and kept at 500℃.
1991-03-01