Direct Laser Beam Writing on YBaCuO Film for Superconducting Microelectronic Devices : Electrical Properties Condensed Matter

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概要

• 論文の詳細を見る

• Patterning of Y-Ba-Cu-O thin film has been accomplished using a pulsed Nd:YAG laser and a specially developed software for this purpose. Various structure of different dimension and shapes have been generated. In contrast with other researchers this process does not require any mask and complete removal of the film material has been achieved. In addition the process does not suffer from the disadvantages/problems normally associated with photolithography, wet chemical etching and plasma etching of superconducting thin films. The process has tremendous potential particularly for fabricating superconducting microelectronic devices using Y-Ba-Cu-O thin films.

• 社団法人応用物理学会の論文
• 1988-08-20

著者

• Bhatnagar S.

  Semiconductor Devices Area Central Electronics Engineering Research Institute

• PANDEY H.

  Semiconductor Devices Area, Central Electronics Engineering Research Institute

• JAIN Y.

  Semiconductor Devices Area, Central Electronics Engineering Research Institute

• SINGH B.

  Semiconductor Devices Area, Central Electronics Engineering Research Institute

• KHOKLE W.

  Semiconductor Devices Area, Central Electronics Engineering Research Institute

• Khokle W.

  Semiconductor Devices Area Central Electronics Engineering Research Institute

• Pandey H.

  Semiconductor Devices Area Central Electronics Engineering Research Institute

• Jain Y.

  Semiconductor Devices Area Central Electronics Engineering Research Institute

関連論文

• Direct Laser Beam Writing on YBaCuO Film for Superconducting Microelectronic Devices : Electrical Properties Condensed Matter

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