Induction Time for Nucleation in Amorphous Silicon Films Prepared by Plasma CVD : Condensed Matter
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1988-08-20
著者
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Hiramoto Masahiro
Advanced Technology Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Hiramoto Masahiro
Dept. Of Electrical And Computer Eng. Kanazawa University
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SUZUKI Masakuni
Dept. of Electrical and Computer Eng., Kanazawa University
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OGUIRA Mitsugu
Dept. of Electrical and Computer Eng., Kanazawa University
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KAMISAKI Wataru
Dept. of Electrical and Computer Eng., Kanazawa University
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HASEGAWA Seiichi
Dept. of Electrical and Computer Eng., Kanazawa University
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Oguira Mitsugu
Dept. Of Electrical And Computer Eng. Kanazawa University
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Suzuki Masakuni
Dept. Of Electrical And Computer Eng. Kanazawa University
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Kamisaki Wataru
Dept. Of Electrical And Computer Eng. Kanazawa University
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Hasegawa Seiichi
Dept. Of Electrical And Computer Eng. Kanazawa University