5GHz Range SAW Filter Fabricated by Electron Beam Exposure With O_2-Plasma Ashing Techniques : SAW and Communication Devices
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1986-08-07
著者
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Meguro Toshiyasu
Reserch Institute Of Electrical Communication Tohoku University
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YAMANOUCHI Kazuhiko
Reserch Institute of Electrical Communicaion, Tohoku University
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Yamanouchi Kazuhiko
Reserch Institute Of Electrical Communication Tohoku University
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CHEN Zhuo
Reserch Institute of Electrical Communication, Tohoku University
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Chen Zhuo
Reserch Institute Of Electrical Communication Tohoku University
関連論文
- Observation of Ferroelectric Polarization in KNbO_3 Thin Films and Surface Acoustic Wave Properties
- 5GHz Range SAW Filter Fabricated by Electron Beam Exposure With O_2-Plasma Ashing Techniques : SAW and Communication Devices