Magnetically Enhanced Reactive Ion Etching of Lead Zirconate Titanate Thin Film by CHF_3 Plasma

Electronic Materials Research Laoratory, Xi'an Jiaotong University

Xi'an Jiaotong Univ. Xi'an Chn

Electronic Materials Research Laboratory Key Laboratory Of Ministry Of Education Xi'an Jiaotong

Institute Of Microelectronics Department Of Electronic Engineering Fudan University

Institute of Microelectronics, Department of Electronic Engineering, Fudan University

Electronic materials Research Laboratory, Xi'an jiaotong University

Institute of Microelectronics, Department of Electronic Engineering, Fudan University

Fudan Univ. Shanghai Chn

Institute Of Microelectronics Department Of Electronic Engineering Fudan University

Electronic Materials Research Laboratory Xi'an Jiaotong University

Institute Of Microelectronics Department Of Electronic Engineering Fudan University