A Parallel-Bimorph-Type Piezoelectric Actuator for High-Resolution Imager

概要

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As minute positioning actuators for high-resolution imagers using CCD (charge coupled device)-chip-shift operation, piezoelectric bimorph actuators having low voltage drive and high-speed response are required. In this study, a highly sensitive parallel-bimorph-type piezoelectric actuator using both-ends support with a U-shaped metal plate is proposed and developed. Firstly, the effectiveness of the proposed actuator is confirmed from the frequency and displacement characteristics in relation to the added mass. Secondly, a parallel-bimorph-type piezoelectric actuator where two bimorphs are a ranged parallel to each other is fabricated for use in a high-resolution imager that employs CCD-chip-shift operation for practical applications. Through those experiments, the optimal bimorph length and the U-shaped metal plate length are experimentally obtained for stable and high performance of the imager. A box-shaped package of imager, with a 22-pin, dual-in-line formal, and dimensions of 30(L) × 20(W) × 11(H) mm is obtained. A demand displacement of 8.5 × 10^<-3> mm is obtained at a driving voltage of 13 Vp-p (30 Hz pulses).
社団法人応用物理学会の論文
1999-09-30