Temperature Characteristic Compensation of a Miniature Bi-Axial Gyro-Sensor Using a Disk-Type Resonator

概要

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One of the authors has already reported a new type of miniature bi-axial gyro-sensor with a disk-type resonator, The gyro-sensor was used to detect bi-axial signals and therefore consisted of a quadrant-electrode-piezoelectric ceramics (PZT) disk and a globular weight, bonded and placed, respectively, on each surface of a metal disk. When an angular rate at right angles to the vibration was added to the sensor, Coriolis force was applied to give a deflective motion to the globular weight. Therefore, the sensor could detect bi-axial angular rates simultaneously. However, in this condition, the sensor did not have good temperature characteristics of sensitivity; the difference between the resonance frequencies of the two modes used was changed by the ambient temperature. In order to improve the temperature characteristics of resonance frequencies of the two modes, we studied the frequency compensation circuit for the driving mode. Moreover, we developed a voltage corrective circuit to achieve stable temperature characteristics of driving voltage. When applying the two compensation methods, the temperature characteristics of sensitivity showed changes of only -15 to 5% over the temperature range of -10℃ to 80℃. This characteristic satisfied the general specifications for video cameras.
社団法人応用物理学会の論文
1999-09-30