Formation of Pb(Zr, Ti)O_3-Pb(Zn, Nb)O_3 System Piezoelectric Thick Films in Low-Temperature Firing Process

概要

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Piezoelectric thick-films of 0.7Pb(Zr, Ti)O_3-0.3Pb(Zn, Nb)O_3 were prepared on ZrO_2 ceramic substrates by firing the printed paste at 800-950℃. As a source material for the paste, glass-ceramics composed of a lead-based glass and nucleation initiators of TiO_2 and ZrO_2 were used together with the mother material of Pb(Zr, Ti)O_3-Pb(Zn, Nb)O_3, The piezoelectric properties were evaluated with a unimorph actuator formed out the ZrO_2 thin substrate. The remanent polarization was, 11 to 12 μC/cm^2. The coercive field was 13 to 14kV/cm and the piezoelectric constant d_<33> was 260 to 320 pC/N. Thick-film material consisting of Pb(Zn, Nb)O_3 modified PZT powder and glass-ceramics containing nucleation initiators are very useful for obtaining densification in low-temperature firing and excellent piezoelectric properties.
社団法人応用物理学会の論文
1999-09-30