Kinetic and Steady-State Properties of Magnetron Sputter with Three-Dimensional Magnetic Field

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-07-30

著者

• Shon Chae

  Pohang University Of Science And Technology

• Park Jun

  Pohang University Of Science And Technology

• Lee Jae

  Pohang University Of Science And Technology

• Kang Bong

  Pohang University Of Science And Technology

関連論文

• Modeling and Simulation of a Large-Area Plasma Source
• Kinetic and Steady-State Properties of Magnetron Sputter with Three-Dimensional Magnetic Field

スポンサーリンク