Observation of Recording Marks in Phase-Change Media Using Scanning Electron Microscopy Channelling Contrast Image

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概要

• 論文の詳細を見る

• A technique for observing recording marks by SEM (scanning electron microscopy) channelling contrast imaging was proposed. In phase-change materials, the amorphous phases show less topographic change after the phase-change process, and we hard to be examined by SEM SEI (secondary electron image mode) imaging. Although these recording marks can be observed clearly by TEM (transmission electron microscopy), the TEM specimen preparation method is complicated. The SEM channelling contrast imaging technique provides an easier way to investigate the "distortion" of direct-overwrite amorphous marks in phase-change media.

• 社団法人応用物理学会の論文
• 1999-03-30

著者

• Tseng Mei-rurng

  Division Of Materials Technology Research Materials Research Laboratories Industrial Technology Rese

• Tsai Song-yeu

  Division Of Materials Technology Research Materials Research Laboratories Industrial Technology Rese

• Bow Jong-shing

  Division Of Materials Technology Research Materials Research Laboratories Industrial Technology Rese

• LUOH Tuung

  Division of Materials Technology Research, Materials Research Laboratories Industrial Technology Res

• PENG Alex

  Division of Materials Technology Research, Materials Research Laboratories Industrial Technology Res

• Luoh Tuung

  Division Of Materials Technology Research Materials Research Laboratories Industrial Technology Rese

• Peng Alex

  Division Of Materials Technology Research Materials Research Laboratories Industrial Technology Rese

関連論文

• Observation of Recording Marks in Phase-Change Media Using Scanning Electron Microscopy Channelling Contrast Image

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