Power Durability of Highly Textured Al Electrode in Surface Acoustic Wave Devices
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概要
- 論文の詳細を見る
Highly textured Al[111] films have been grown on an ultrathin metal underlayer by ion-beam sputtering technique regardless of substrate material and its cutting angle. Surface acoustic wave filters with the highly textured Al[111] electrodes were fabricated and the power durability was investigated. They have lifetimes more than 3000 times longer than those with evaporated polycrystalline Al electrodes.
- 社団法人応用物理学会の論文
- 1996-05-30
著者
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Kamijo Atsushi
Fundamental Research Laboratories Nec Corporation
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MATSUKURA Noritsugu
Fundamental Research Laboratories, NEC Corporation
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OOTSUKA Eiichi
Transmission Engineering Division, NEC Corporation
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TAKAHASHI Yoshihiro
Transmission Engineering Division, NEC Corporation
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SAKAIRI Natsuhiko
Transmission Engineering Division, NEC Corporation
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YAMAMOTO Yasushi
Transmission Engineering Division, NEC Corporation
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Ootsuka Eiichi
Transmission Engineering Division Nec Corporation
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Sakairi Natsuhiko
Transmission Engineering Division Nec Corporation
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Matsukura Noritsugu
Fundamental Research Laboratories Nec Corporation
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Kamijo Atsushi
Fundamental Research Laboratories Nec Corp.
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Yamamoto Yasushi
Transmission Division Nec Corporation
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Yamamoto Yasushi
Transmission Engineering Division Nec Corporation
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Takahashi Yoshihiro
Transmission Engineering Division Nec Corporation
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Kamijo Atsushi
Fundamental and Environmental Research Laboratories, NEC Corporation, 34, Miyukigaoka, Tsukuba, Ibaraki 305-8501, Japan
関連論文
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- Optical Design that Increases Light-Extraction Efficiencies of Organic Light-Emitting Devices through Finite-Difference-Time-Domain Method
- Power Durability of Highly Textured Al Electrode in Surface Acoustic Wave Devices
- SAW Resonator for Broad Band Tunable VCO : SAW and BAW Materials, Devices and Theories
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