Low Temperature Synthesis of Diamond Films with Electron Cyclotron Resonance Plasma Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-04-30
著者
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Schweizer Mark
Department Of Electrical And Computer Engineering University Of Cincinnati:(present Address) Departm
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MANTEI Thomas
Department of Electrical and Computer Engineering, University of Cincinnati
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RING Zoltan
Department of Electrical and Computer Engineering, University of Cincinnati
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TLALI Spirit
Department of Physics, University of Cincinnati
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JACKSON Howard
Department of Physics, University of Cincinnati
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Ring Zoltan
Department Of Electrical And Computer Engineering University Of Cincinnati:(present Address) Mcnc P.
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Tlali Spirit
Department Of Physics University Of Cincinnati
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Mantei Thomas
Department Of Electrical And Computer Engineering University Of Cincinnati
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Jackson Howard
Department Of Physics University Of Cincinnati