Surface Analysis during Plasma Etching by Laser-Induced Thermal Desorption
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-04-30
著者
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Herman I
Columbia Univ. New York Usa
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Donnelly V
Lucent Technol. Nj Usa
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HERMAN Irving
Department of Applied Physics and Columbia Radiation Laboratory
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DONNELLY Vincent
Department of Applied Physics and Columbia Radiation Laboratory
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Vincent M.
Bell Laboratories, Lucent Technologies
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CHENG C.
Bell Laboratories, Lucent Technologies
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GUINN Keith
Bell Laboratories, Lucent Technologies
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Guinn Keith
Bell Laboratories Lucent Technologies
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Vincent M.
Bell Laboratories Lucent Technologies
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CHENG C.
Bell Laboratories, Lucent Technologies:(Present address) Gasonics International
関連論文
- Surface Analysis during Plasma Etching by Laser-Induced Thermal Desorption
- Optical Transmission, Photoluminescence, and Raman Scattering of Porous SiC Prepared from ρ-Type 6H SiC