Optical Disc Track Pitch Variation Measurement Using Two Readout Beams

概要

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At present high-density optical discs have narrow track pitch values, and hence it is necessary not only to verify the precision of the track pitch, but also to determine the degree of track pitch variation. Track pitch variation (TPV) is commonly measured using scanning electron, laser scanning and scanning tunneling microscopies. However, these methods are time consuming and it is difficult to take TPV readings from large areas of the disc. We developed a TPV measurement system based on an optical disc player with two readout beams, and using this system we can rapidly measure the TPV over the whole disc surface. In this paper, we describe our TPV measurement system and present the results of TPV measurements taken from a disc containing continuous grooves with a track pitch of 0.84 μm. We found that the TPV of these grooved discs ranged from 30 nm to 100 nm peak-to-peak (pk-pk) with a typical value of 40 nm pk-pk. The measurement resolution of our instrument is about 10 nm pk-pk.
社団法人応用物理学会の論文
1996-01-30