Silicon Microactuators for Computer Disk Drives
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-01-30
著者
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Tai Y‐c
California Inst. Technol. Ca Usa
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Tai Yu-chong
Electrical Engineering California Institute Of Technology
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TANG Weilong
Electrical Engineering, 116-81, California Institute of Technology
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TEMESVARY Viktoria
Electrical Engineering, 116-81, California Institute of Technology
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YAO J.
Rockwell Science Center
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MIU Denny
Electrical Engineering, 116-81, California Institute of Technology
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Miu Denny
Electrical Engineering 116-81 California Institute Of Technology
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Tang Weilong
Electrical Engineering 116-81 California Institute Of Technology
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Temesvary Viktoria
Electrical Engineering 116-81 California Institute Of Technology
関連論文
- A nL/min-Scale Valveless Flow Regulator for Integrated Micro Chemical Devices(Micro Mechanical Engineering)
- Silicon Microactuators for Computer Disk Drives