Multilayer Piezoelectric Ceramic Vibrator with Internal Electrodes

概要

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Multilayer piezoelectric vibrators made from high mechanical quality factor (Q_m) PbZrTiO_3 ceramic material with internal electrodes have been investigated for application to ultrasonic devices. The existence of internal electrodes activates the ceramic sintering reaction and as a result, cofiring of the the multilayer vibrator at a lower temperature becomes possible. Multilayer vibrators with 2-9 layers of internal electrodes were fabricated, and evaluated. The values of Q_m>1500 and k_<31>=0.36 can be obtained. It was found that high-power ultrasonic devices driven by low voltages.
社団法人応用物理学会の論文
1995-09-30